Fully Differential Actuation and Sensing in Piezoelectric Diaphragm Resonators for High Signal to Background Resonant Sensing-Reference-Cited by-同舟云学术

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Fully Differential Actuation and Sensing in Piezoelectric Diaphragm Resonators for High Signal to Background Resonant Sensing

Published:2020-10 Issue:5 Volume:29 Page:888-893
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Tiwari Sudhanshu^ORCID,Kumar Randhir,Chandorkar Saurabh Arun^ORCID,Pratap Rudra^ORCID

Funder

Indian Institute of Science

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx7/84/9212656/09120019.pdf?arnumber=9120019

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Flexural-Mode Piezoelectric Resonators: Structure, Performance, and Emerging Applications in Physical Sensing Technology, Micropower Systems, and Biomedicine;Sensors;2024-06-04

2. Novel Estimation Method for Dielectric Loss Quality Factor in Composite SOI/PZT Devices;2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS);2022-01-09

3. Low cost, contamination-free, and damage-free fabrication of PZT MEMS on SOI substrate;Journal of Micromechanics and Microengineering;2021-12-28

4. Photonics Integrated PiezoMEMS-PipMEMS: A Scalable Hybrid Platform for Next-Generation MEMS;IEEE Sensors Letters;2020-12

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