Cast Monocrystalline Silicon: New Alternative for Micro- and Nano-Electromechanical Systems?
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Published:2019-08
Issue:4
Volume:28
Page:695-699
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ISSN:1057-7157
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Container-title:Journal of Microelectromechanical Systems
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language:
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Short-container-title:J. Microelectromech. Syst.
Author:
Liu ZhengjunORCID,
Vahanissi VilleORCID,
Chekurov Nikolai,
Tittonen Ilkka,
Savin Hele
Funder
Sähkötekniikan Korkeakoulu, Aalto-yliopisto
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Mechanical Engineering