Characterization of AlScN-Based Multilayer Systems for Piezoelectric Micromachined Ultrasound Transducer (pMUT) Fabrication-Reference-Cited by-同舟云学术

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Characterization of AlScN-Based Multilayer Systems for Piezoelectric Micromachined Ultrasound Transducer (pMUT) Fabrication

Published:2021-04 Issue:2 Volume:30 Page:290-298
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Bespalova Kristina,Osterlund Elmeri,Ross Glenn,Paulasto-Krockel Mervi,Sebastian Abhilash Thanniyil,Karuthedath Cyril Baby,Mertin Stefan,Pensala Tuomas

Funder

POSITION-II project

ECSEL Joint Undertaking

Sähkötekniikan Korkeakoulu, Aalto-yliopisto

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx7/84/9395268/09354444.pdf?arnumber=9354444

Cited by 13 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Enhanced high-frequency piezoelectric ultrasonic transducer based on integrated AlN honeycomb structure;Sensors and Actuators A: Physical;2024-07

2. Sc_xAl1-xN piezoelectric film grown at room temperature;Journal of Physics: Conference Series;2024-04-01

3. PMUT and CMUT Devices for Biomedical Applications: A Review;IEEE Access;2024

4. Development of ScAlN PMUTs for Medical Applications;Journal of Microelectromechanical Systems;2023-10

5. AlYN Thin Films with High Y Content: Microstructure and Performance;physica status solidi (RRL) – Rapid Research Letters;2023-07-21

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