Affiliation:
1. Graduate Institute of Electronics Engineering, National Taiwan University, Taipei, Taiwan
Funder
National Science and Technology Council (NSTC), Taiwan
Semiconductor Fabrication Laboratory of the Consortia of Key Technologies and the Nano-Electro-Mechanical-System Research Center, National Taiwan University
Ministry of Education (MOE), Taiwan
Taiwan Semiconductor Research Institute
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Mechanical Engineering