Virtual metrology enabled early stage prediction for enhanced control of multi-stage fabrication processes-Reference-Cited by-同舟云学术

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Virtual metrology enabled early stage prediction for enhanced control of multi-stage fabrication processes

Published:2013-08 Issue: Volume: Page:
ISSN:
Container-title:2013 IEEE International Conference on Automation Science and Engineering (CASE)
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Author:

Susto Gian Antonio,Johnston Adrian B.,O'Hara Paul G.,McLoone Sean

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/6639384/6653883/06653980.pdf?arnumber=6653980

Cited by 15 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Understanding and Improving Virtual Metrology Systems Using Bayesian Methods;IEEE Transactions on Semiconductor Manufacturing;2022-08

2. An Autoencoder-Based Approach for Fault Detection in Multi-Stage Manufacturing: A Sputter Deposition and Rapid Thermal Processing Case Study;IEEE Transactions on Semiconductor Manufacturing;2022-05

3. Enhancing Scalability of Virtual Metrology: A Deep Learning-Based Approach for Domain Adaptation;2020 Winter Simulation Conference (WSC);2020-12-14

4. Vision-based high speed wafer film thickness profile estimation with nonlinear regression;ODS 2020: Industrial Optical Devices and Systems;2020-08-21

5. Soft metrology based on machine learning: a review;Measurement Science and Technology;2019-12-02

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