TSV MEOL (Mid End of Line) and packaging technology of mobile 3D-IC stacking

Author:

Na Duk Ju,Aung Kyaw Oo,Choi Won Kyung,Kida Tsuyoshi,Ochiai Toshihiko,Hashimoto Tomoaki,Kimura Michitaka,Kata Keiichirou,Yoon Seung Wook,Yong Andy Chang Bum

Publisher

IEEE

Cited by 6 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. High-Precision Wafer Bonding Alignment Mark Using Moiré Fringes and Digital Grating;Micromachines;2022-12-07

2. A novel method to detect wafer-bonding energy using function fitting;Review of Scientific Instruments;2021-12-01

3. Types;Electronic Enclosures, Housings and Packages;2019

4. 3D Packaging Architectures and Assembly Process Design;3D Microelectronic Packaging;2017

5. InFO (Wafer Level Integrated Fan-Out) Technology;2016 IEEE 66th Electronic Components and Technology Conference (ECTC);2016-05

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