Author:
Taira K.,Kasahara J.,Kato Y.,Arai M.,Watanabe N.
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials
Cited by
4 articles.
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1. Iii–V Semiconductor Devices;Materials Processing: Theory and Practices;1989
2. Rapid thermal annealing of arsenic, beryllium and zinc dual implanted AlGaAs;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1987-01
3. Annealing of zinc‐implanted GaAs;Journal of Applied Physics;1985-06-15
4. Reproducible “Leaky Tube” Diffusion of Zinc into GaAs with Submicron Junction Depths;Journal of The Electrochemical Society;1984-07-01