Die to Wafer Hybrid Bonding for Chiplet and Heterogeneous Integration: Die Size Effects Evaluation-Small Die Applications
Author:
Affiliation:
1. Adeia,San Jose,USA
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9816066/9816372/09816427.pdf?arnumber=9816427
Reference21 articles.
1. Development of Low Temperature Direct Bond Interconnect Technology for Die-To-Wafer and Die-To-Die Applications-Stacking, Yield Improvement, Reliability Assessment
2. Low Temperature Cu Interconnect with Chip to Wafer Hybrid Bonding
3. Chip to Wafer Hybrid Bonding with Cu Interconnect: High Volume Manufacturing Process Compatibility Study
4. Cu interconnect scaling with hybrid bonding for 2.5 and 3D integration;workman;IMAPS Device Packaging Conference,2020
5. Die to Wafer Stacking with Low Temperature Hybrid Bonding
Cited by 12 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Advancing Fine Pitch (< 5μm) Interconnects through Self-Aligned Die-to-Wafer Hybrid Bonding for Chiplet Integration;2023 IEEE 25th Electronics Packaging Technology Conference (EPTC);2023-12-05
2. Assembly process characterization of 3D Stacking of Heterogeneous Chiplets;2023 IEEE 25th Electronics Packaging Technology Conference (EPTC);2023-12-05
3. Multi-Product Optimization for 3D Heterogeneous Integration with D2W Bonding;2023 IEEE/ACM International Conference on Computer Aided Design (ICCAD);2023-10-28
4. Toward monolithic growth integration of nanowire electronics in 3D architecture: a review;Science China Information Sciences;2023-09-06
5. Surface Protecting and Particles Removing after Wafer Sawing for Die-to-wafer Hybrid Bonding;2023 24th International Conference on Electronic Packaging Technology (ICEPT);2023-08-08
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3