Design of a MEMS Optical Microphone Transducer Based on Light Phase Modulation
Author:
Affiliation:
1. Infineon Technologies Austria, Villach, Austria
2. Infineon Technologies Neubiberg, Neubiberg, Germany
3. Department of Physics, University of Milano-Bicocca, Milan, Italy
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Instrumentation
Link
http://xplorestaging.ieee.org/ielx7/7361/10418056/10353955.pdf?arnumber=10353955
Reference16 articles.
1. MEMS optical microphone based on light phase modulation
2. Micromachined microphones with integrated optical nanoscale displacement sensors
3. Diffraction-based integrated optical readout for micromachined optomechanical sensors;Lee,2006
4. Optical microphone transduction techniques
5. Packaging and characterization of MEMS optical microphones;Garcia,2007
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1. A 22-dBA Digital Optical MEMS Microphone;IEEE Journal of Solid-State Circuits;2024-07
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