MEMS Surface Acoustic Wave Resonator Based on AlN/Si/Fe–Co–Si–B Structure for Magnetic Field Sensing-Reference-Cited by-同舟云学术

MEMS Surface Acoustic Wave Resonator Based on AlN/Si/Fe–Co–Si–B Structure for Magnetic Field Sensing

Published:2022-12-01 Issue:23 Volume:22 Page:22510-22518
ISSN:1530-437X
Container-title:IEEE Sensors Journal
language:
Short-container-title:IEEE Sensors J.

Author:

Huang Fei¹^ORCID,Zhang Wenxu¹,Li Ling²,Sun Zhaofeng¹^ORCID,Yang Yuntao¹,Chen Ruichao¹,Peng Bin¹^ORCID,Zhang Wanli¹

Affiliation:

1. State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu, P. R. China

2. Research Center for Humanoid Sensing, Zhejiang Laboratory, Hangzhou, P. R. China

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Instrumentation

Link

http://xplorestaging.ieee.org/ielx7/7361/9966666/09923580.pdf?arnumber=9923580

Reference48 articles.

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4. surface acoustic wave resonator development;schoenwald;29th Annual Symposium on Frequency Control,1975

5. Micromachined One-Port Aluminum Nitride Lamb Wave Resonators Utilizing the Lowest-Order Symmetric Mode

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