Affiliation:
1. National and Local Joint Engineering Research Center of Crystal Growth Equipment and System Integration, Xi’an University of Technology, Xi’an, China
Funder
National Major Scientific Research Equipment of China
Key Program of National Natural Science Foundation of China
National Natural Science Foundation (NNSF) of China
Natural Science Basic Research Plan in Shaanxi Province of China
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Instrumentation
Cited by
1 articles.
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1. Modeling and Simulation Design of Single Crystal Silicon Growth by Czochralski Method;2024 5th International Conference on Mechatronics Technology and Intelligent Manufacturing (ICMTIM);2024-04-26