Microgrooves Array on Phase-Change Germanium-Antimony-Tellurium Alloys Nanofilm THz Detector

Author:

Song Qi1ORCID,Chen Wei2ORCID,Yang Jiachen2,Zhang Min3ORCID,Gao Feilong1,Zhang Bingyuan1ORCID,Dong Bo4ORCID,Yan Peiguang3ORCID,Lu Yanqing2

Affiliation:

1. Shandong Key Laboratory of Optical Communication Science and Technology, School of Physics Science and Information Technology, Liaocheng University, Liaocheng, China

2. National Laboratory of Solid State Microstructures, Key Laboratory of Intelligent Optical Sensing and Manipulation, College of Engineering and Applied Sciences, and the Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing, China

3. Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education and Guangdong Province, College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen, China

4. College of Integrated Circuits and Optoelectronic Chips, Shenzhen Technology University, Shenzhen, China

Funder

NSFC

Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education and Guangdong Province, Research Foundation of Liaocheng University

National Key Research and Development Program of China

Natural Science Foundation of Jiangsu Province, Major Project

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Instrumentation

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