1. IMTEK – Department of Microsystems Engineering, Laboratory for Sensors and the Laboratory for Electrical Instrumentation and Embedded Systems, University of Freiburg, Freiburg, Germany
2. IMTEK – Department of Microsystems Engineering, Laboratory for Electrical Instrumentation and Embedded Systems, University of Freiburg, Freiburg, Germany
3. IMTEK – Department of Microsystems Engineering, Laboratory for Sensors, University of Freiburg, Freiburg, Germany