A fast and low actuation voltage MEMS switch for mm-wave and its integration-Reference-Cited by-同舟云学术

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A fast and low actuation voltage MEMS switch for mm-wave and its integration

Published:2010-12 Issue: Volume: Page:
ISSN:
Container-title:2010 International Electron Devices Meeting
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Author:

Akiba Akira¹,Mitarai Shun¹,Morita Shinya¹,Ikeda Koichi¹,Kurth Steffen²,Leidich Stefan²,Bertz Andreas³,Nowack Markus³,Froemel Joerg²,Gessner Thomas²

Affiliation:

1. Sony Corporation, Core Device Development Group, RF Transmission & Video System Development Division, Atsugi-shi, Japan

2. Fraunhofer Res. Instn. for Electron. Nano Syst., Chemnitz, Germany

3. Center for Micro Technol., Chemnitz Univ. of Technol., Chemnitz, Germany

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx5/5692854/5703218/05703487.pdf?arnumber=5703487

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Analysis of Au metal–metal contacts in a lateral actuated RF MEMS switch;International Journal of Microwave and Wireless Technologies;2014-07-24

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