Thelma-double: A New Technology Platform for Manufacturing of High-Performance Mems Inertial Sensors-Reference-Cited by-同舟云学术

Thelma-double: A New Technology Platform for Manufacturing of High-Performance Mems Inertial Sensors

Published:2022-01-09 Issue: Volume: Page:
ISSN:
Container-title:2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)
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Author:

Vercesi Federico¹,Corso Lorenzo¹,Allegato Giorgio¹,Gattere Gabriele¹,Guerinoni Luca¹,Valzasina Carlo¹,Nomellini Andrea¹,Alessandri Anna¹,Gelmi Ilaria¹

Affiliation:

1. STMicroelectronics MEMS technology development

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9698823/9699435/09699437.pdf?arnumber=9699437

Reference6 articles.

1. Tri-axial MEMS gyroscopes and Six Degree-Of-Freedom Motion Sensors

2. Advanced surface micromachining process — A first step towards 3D MEMS

3. Inertial MEMS

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