Silicon MEMS Gyroscope with Quatrefoil Suspension System Achieving 1 Million Quality Factor-Reference-Cited by-同舟云学术

Silicon MEMS Gyroscope with Quatrefoil Suspension System Achieving 1 Million Quality Factor

Published:2022-01-09 Issue: Volume: Page:
ISSN:
Container-title:2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)
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Author:

Parajuli Madan¹,Sobreviela Guillermo²,Seshia Ashwin A.¹

Affiliation:

1. University of Cambridge,Nanoscience Centre,Department of Engineering,Cambridge,UK

2. Silicon Microgravity Ltd,Cambridge,UK

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9698823/9699435/09699510.pdf?arnumber=9699510

Reference11 articles.

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2. Ultra-high Q silicon gyroscopes with interchangeable rate and whole angle modes of operation

3. A vibrating beam mems accelerometer for gravity and seismic measurements;mustafazade;Scientific Reports,2020

4. Sub-Deg-per-Hour Edge-Anchored Bulk Acoustic Wave Micromachined Disk Gyroscope

5. Elec-trostatic frequency tuning of bulk acoustic wave disk gyroscopes;parajuli;2020 Joint Conference of the IEEE International Frequency Control Symposium and Inter-national Symposium on Applications of Ferroelectrics (IFCS-ISAF),0

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1. Design and dynamic analysis of a highly sensitive MEMS gyroscope based on mode localization;Measurement Science and Technology;2024-01-22

2. A Silicon MEMS Quatrefoil Suspension Gyroscope;Journal of Microelectromechanical Systems;2023-10

3. Frequency Modulated Operation in a Silicon MEMS Gyroscope with Quatrefoil Suspension System;2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL);2022-05-08

4. Electrostatic Frequency Tuning of a Quatrefoil Suspension Gyroscope;2022 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS);2022-04-24