Discovery of Resource-Oriented Transition Systems for Yield Enhancement in Semiconductor Manufacturing-Reference-Cited by-同舟云学术

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Discovery of Resource-Oriented Transition Systems for Yield Enhancement in Semiconductor Manufacturing

Published:2021-02 Issue:1 Volume:34 Page:17-24
ISSN:0894-6507
Container-title:IEEE Transactions on Semiconductor Manufacturing
language:
Short-container-title:IEEE Trans. Semicond. Manufact.

Author:

Cho Minsu,Park Gyunam^ORCID,Song Minseok^ORCID,Lee Jinyoun,Lee Byeongeon,Kum Euiseok

Funder

Research Program from Samsung Electronics Company Ltd

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://xplorestaging.ieee.org/ielx7/66/9345940/09298776.pdf?arnumber=9298776

Cited by 8 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Semiconductor industry's transformation path under circular economy: Evidence from micro-level efficiency evaluation;Computers & Industrial Engineering;2024-03

2. Turning Logs into Lumber: Preprocessing Tasks in Process Mining;Lecture Notes in Business Information Processing;2024

3. Process Mining in Manufacturing and Logistics: A Systematic Mapping and New Taxonomy Proposal;2024

4. Graphical approach of equipment health monitoring using network analysis;2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC);2023-05-01

5. Graphical approach of equipment health monitoring using network analysis;2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM);2023-03-07

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