Nonequilibrium Plasma Cleaning of Organic Contaminants on the Surface of Diffraction Gratings

Author:

Bai Qingshun1ORCID,Liu Xujie1ORCID,Sun Hao2,Li Yuhai1,Chen Jiaxuan1,Zhang Peng1,Yuan Xiaodong3

Affiliation:

1. School of Mechanical and Electrical Engineering, Harbin Institute of Technology, Harbin, China

2. School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan, China

3. Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang, China

Funder

Joint Fund of the National Natural Science Foundation of China and China Academy of Engineering Physics

National Natural Science Foundation of China

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Condensed Matter Physics,Nuclear and High Energy Physics

Cited by 1 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Panel-Level Plasma Development;2024 IEEE 4th International Conference on Electronic Communications, Internet of Things and Big Data (ICEIB);2024-04-19

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