Thin Film PZT Multimode Resonant MEMS Temperature Sensor
Author:
Affiliation:
1. University of Florida,Department of Electrical and Computer Engineering,Gainesville,FL,USA,32611
2. School of Integrated Circuits and Electronics, Beijing Institute of Technology (BIT),Beijing,China,100081
Funder
CISE CCF-FET Program
National Institutes of Health (NIH)
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9966996/9966997/09967330.pdf?arnumber=9967330
Reference11 articles.
1. Passive wireless temperature sensing with piezoelectric MEMS resonators
2. Temperature Sensor Using Quartz Tuning Fork Resonator
3. A High-Density and Dual-Frequency PMUT Array Based On Thin Ceramic PZT for Endoscopic Photoacoustic Imaging
4. AlScN‐on‐SiC Thin Film Micromachined Resonant Transducers Operating in High‐Temperature Environment up to 600 °C
5. A self-sustaining ultrahigh-frequency nanoelectromechanical oscillator
Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. A Piezoelectric MEMS Resonant Temperature Sensor with 10-μk Resolution and 0.06-PJK2 Resolution FOM;2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS);2024-01-21
2. Micromachined Thin Film Ceramic PZT Multimode Resonant Temperature Sensor;IEEE Sensors Journal;2023
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