Nano-Gap Contact MEMS Torsional Mode Acceleration Switch Wake-up Sensor-Reference-Cited by-同舟云学术

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Nano-Gap Contact MEMS Torsional Mode Acceleration Switch Wake-up Sensor

Published:2022-10-30 Issue: Volume: Page:
ISSN:
Container-title:2022 IEEE Sensors
language:
Short-container-title:

Author:

Koh Yul¹,Goh Duan Jian¹,Ghosh Sagnik¹,Wong Han Xuan¹,Sharma Jaibir¹,Lal Amit¹,Ng Eldwin J.¹,Lee Joshua En-Yuan¹

Affiliation:

1. Institute of Microelectronics, A*STAR,Singapore

Funder

A*STAR

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9966996/9966997/09967063.pdf?arnumber=9967063

Reference13 articles.

1. Conception, fabrication and characterization of a silicon based MEMS inertial switch with a threshold value of 5 g

2. A high-sensitivity z-axis capacitive silicon microaccelerometer with a torsional suspension

3. Asymmetric seesaw structure of microelectromechanical systems accelerometer for sensing out-off-plane acceleration

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Ultra-Low Power MEMS Inertial Switch Based Wake-Up Wireless Sensing Node for Door Lock Monitoring;2023 IEEE SENSORS;2023-10-29

2. Wake-Up IoT Wireless Sensing Node Based on a Low-G Threshold mems Inertial Switch with Reliable Contacts;2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS);2023-01-15

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