Design of a 5-Axis Macro-Micro Series-Parallel Hybrid Robot Positioning System
Author:
Affiliation:
1. School of Mechanical and Automotive Engineering, South China University of Technology,Guangdong Province Key Laboratory of Precision Equipment and Manufacturing Technology,Guangzhou,P. R. China,510640
Funder
National Natural Science Foundation of China
Fundamental Research Funds for the Central Universities
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10294098/10294107/10294142.pdf?arnumber=10294142
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4. Kinematic Design of a 3-DOF Force-controlled End-effector with Flexure Joints for Robotic Finishing Applications *
5. Design of the ultraprecision stage for lithography using VCM[C];kim;ICMIT 2007 Mechatronics MEMS and Smart Materials,2008
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