Polarization-Induced Temperature Instability of HfO2-Based Ferroelectric FET

Author:

Jin Chengji1ORCID,Xu Jiacheng1,Gu Jiani1ORCID,Chen Jiajia1ORCID,Zhang Hongrui1,Liu Huan1,Qian Haoji1,Chen Bing2ORCID,Cheng Ran3ORCID,Liu Yan4ORCID,Yu Xiao1ORCID,Han Genquan2ORCID

Affiliation:

1. Zhejiang Laboratory, Research Center for Intelligent Chips and Devices, Hangzhou, China

2. Hangzhou Institute of Technology, Xidian University, Hangzhou, China

3. School of Micro-Nano Electronics, Zhejiang University, Hangzhou, China

4. School of Microelectronics, Xidian University, Xi’an, China

Funder

National Natural Science Foundation of China

Zhejiang Province Key Research and Development Programs

Zhejiang Provincial Natural Science Foundation

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials

Reference19 articles.

1. A 28 nm HKMG super low power embedded NVM technology based on ferroelectric FETs;Trentzsch,2016

2. A FeFET based super-low-power ultra-fast embedded NVM technology for 22 nm FDSOI and beyond;Dunkel,2017

3. Vertical Ferroelectric HfO2 FET based on 3-D NAND Architecture: Towards Dense Low-Power Memory

4. Analog In-memory Computing in FeFET-based 1T1R Array for Edge AI Applications

5. BEOL-Compatible Superlattice FEFET Analog Synapse With Improved Linearity and Symmetry of Weight Update

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