Design of a Square MEMS Piezoelectric Accelerometer With a Wide Range of Applicability, a Low Transverse Sensitivity Ratio, and High Accuracy-Reference-Cited by-同舟云学术

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Design of a Square MEMS Piezoelectric Accelerometer With a Wide Range of Applicability, a Low Transverse Sensitivity Ratio, and High Accuracy

Published:2022-05-15 Issue:10 Volume:22 Page:9306-9312
ISSN:1530-437X
Container-title:IEEE Sensors Journal
language:
Short-container-title:IEEE Sensors J.

Author:

Li Cheng-Ying¹^ORCID,Chen Yueh-Han²^ORCID,Wei Zhi-Yuan³,Ho Yi-Chen¹,Chu Sheng-Yuan¹^ORCID,Tsai Cheng-Che⁴^ORCID,Hong Cheng-Shong³

Affiliation:

1. Department of Electrical Engineering, National Cheng Kung University, Tainan, Taiwan

2. Institute of Electrical Engineering, National Cheng Kung University, Tainan, Taiwan

3. Department of Electronic Engineering, National Kaohsiung Normal University, Kaohsiung, Taiwan

4. Department of Digital Game and Animation Design, Tung Fang Design University, Kaohsiung, Taiwan

Funder

Ministry of Science and Technology (MOST), Taiwan

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Instrumentation

Link

http://xplorestaging.ieee.org/ielx7/7361/9774386/09745841.pdf?arnumber=9745841

Reference30 articles.

1. A Resonant Z-Axis Aluminum Nitride Thin-Film Piezoelectric MEMS Accelerometer

2. Design and Fabrication of a Novel T-Shaped Piezoelectric ZnO Cantilever Sensor

3. Fabrication of a ZnO piezoelectric micro cantilever with a high-aspect-ratio nano tip

4. A Novel Trapezoidal ScAlN/AlN-Based MEMS Piezoelectric Accelerometer

5. Fabrication and function examination of PZT-based MEMS accelerometers

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Effects of TiO2 layer and post-heat treatment on the crack-free and improved electric properties of sol-gel derived PZT-based films for MEMS applications;Materials Science and Engineering: B;2024-09

2. A Comprehensive Review on Low-Cost MEMS Accelerometers for Vibration Measurement: Types, Novel Designs, Performance Evaluation, and Applications;Journal of Molecular and Engineering Materials;2024-05-25

3. A polymeric piezoelectric MEMS accelerometer with high sensitivity, low noise density, and an innovative manufacturing approach;Microsystems & Nanoengineering;2023-11-29

4. Design and Development of Ultralow-Power MEMS Lead-Free Piezoelectric Accelerometer Digital System for Unmanned Aerial Vehicle Motor Monitoring;IEEE Sensors Journal;2023-08-15

5. Directivity Modeling and Simulation Analysis of a Novel Structure MEMS Piezoelectric Vector Hydrophone;Micromachines;2023-07-26

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