Sensing Techniques and Interrogation Methods in Optical MEMS Accelerometers: A Review-Reference-Cited by-同舟云学术

Sensing Techniques and Interrogation Methods in Optical MEMS Accelerometers: A Review

Published:2022-04-01 Issue:7 Volume:22 Page:6232-6246
ISSN:1530-437X
Container-title:IEEE Sensors Journal
language:
Short-container-title:IEEE Sensors J.

Author:

Malayappan Balasubramanian¹^ORCID,Lakshmi U. Poorna²,Rao B. V. V. S. N. Prabhakar¹^ORCID,Ramaswamy Kannan³,Pattnaik Prasant Kumar¹^ORCID

Affiliation:

1. Department of Electrical and Electronics Engineering and the Physics Department, Birla Institute of Technology and Science, Pilani, Hyderabad, Telangana, India

2. Department of Electronics and Communication Engineering, Vignana Bharathi Institute of Technology, Hyderabad, Telangana, India

3. Physics Department, Birla Institute of Technology and Science, Pilani, Hyderabad, Telangana, India

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Instrumentation

Link

http://xplorestaging.ieee.org/ielx7/7361/9745626/09706218.pdf?arnumber=9706218

Reference144 articles.

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4. Lateral optical accelerometer micromachined in (100) silicon with remote readout based on coherence modulation

5. Fiber optical accelerometer based on 45 degrees Fabry–Pérot cavity;han;Proc SPIE,2014

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