BEoL integrated hafnium zirconium oxide varactors for tunable mmWave applications
Author:
Affiliation:
1. Center Nanoelectronic Technologies, Fraunhofer IPMS,Dresden,Germany,01109
2. Institute of Solid State Electronics, Dresden University of Technology,Dresden,Germany,01069
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9947060/9947094/09947182.pdf?arnumber=9947182
Reference22 articles.
1. Back‐End‐of‐Line Compatible Low‐Temperature Furnace Anneal for Ferroelectric Hafnium Zirconium Oxide Formation
2. Tunability of Ferroelectric Hafnium Zirconium Oxide for Varactor Applications
3. Influence of antiferroelectric-like behavior on tuning properties of ferroelectric HZO-based varactors
4. The effect of temperature on the ferroelectric properties of Hafnium Zirconium Oxide MFM thin-film varactors
5. Investigation of BEoL integrated ferroelectric thin-film Hf02 for mmWave varactor applications;abdualzhanov;2012 IEEE International Symposium on Radio-Frequency Integration Technology (RFIT),0
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1. A novel reconfigurable RF switch based on ferroelectric hafnium oxide FeFET fabricated in 22 nm FDSOI technology;2023 18th European Microwave Integrated Circuits Conference (EuMIC);2023-09-18
2. Reconfigurable ferroelectric hafnium oxide FeFET fabricated in 28 nm CMOS technology for mmWave applications;ESSDERC 2023 - IEEE 53rd European Solid-State Device Research Conference (ESSDERC);2023-09-11
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