Wafer distribution system for a clean room using a novel magnetic suspension technique-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Wafer distribution system for a clean room using a novel magnetic suspension technique

Published:1998-03 Issue:1 Volume:3 Page:73-78
ISSN:1083-4435
Container-title:IEEE/ASME Transactions on Mechatronics
language:
Short-container-title:IEEE/ASME Trans. Mechatron.

Author:

Park K.H.,Ahn K.Y.,Kim S.H.,Kwak Y.K.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Computer Science Applications,Control and Systems Engineering

Link

http://xplorestaging.ieee.org/ielx3/3516/14510/00662871.pdf?arnumber=662871

Cited by 26 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Characteristics Analysis of an Electromagnetic Actuator for Magnetic Levitation Transportation;Actuators;2022-12-15

2. Magnetic Levitation Technology for Precision Motion Systems: A Review and Future Perspectives;International Journal of Automation Technology;2022-07-05

3. Permanent Maglev Platform Using a Variable Flux Path Mechanism: Stable Levitation and Motion Control;IEEE Transactions on Magnetics;2022-07

4. Requirements for a transportation system based on ultrasonic traveling waves using the measurement of spatial phase difference;Mechanical Systems and Signal Processing;2022-04

5. Design of Zero-power Control Strategy with Resisting Tilt of Hybrid Magnetic Levitation System;IEEE Transactions on Industrial Electronics;2021

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP