Modeling of CMOS Integrated Strain Sensors and Sensitivity Enhanced Readout Architecture
Author:
Affiliation:
1. Institute for Integrated Circuits, Hamburg University of Technology, Hamburg, Germany
2. Department of Microsystems Engineering-IMTEK, Chair of Microelectronics, University of Freiburg, Freiburg, Germany
Funder
German Federation of Industrial Research Associations
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Hardware and Architecture
Link
http://xplorestaging.ieee.org/ielx7/8919/10416295/10358365.pdf?arnumber=10358365
Reference22 articles.
1. Enabling of Predictive Maintenance in the Brownfield through Low-Cost Sensors, an IIoT-Architecture and Machine Learning
2. Choosing the most suitable predictive maintenance sensor;Murphey,2020
3. Six-Axis Force/Torque Sensors for Robotics Applications: A Review
4. CMOS stress sensors on [100] silicon
5. A Wireless Stress Mapping System for Orthodontic Brackets Using CMOS Integrated Sensors
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