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Silicon Nanotweezers With Subnanometer Resolution for the Micromanipulation of Biomolecules

  • Published:2008-06 Issue:3 Volume:17 Page:623-631
  • ISSN:1057-7157
  • Container-title:Journal of Microelectromechanical Systems
  • language:
  • Short-container-title:J. Microelectromech. Syst.

Author:

Yamahata C.,Collard D.,Legrand B.,Takekawa T.,Kumemura M.,Hashiguchi G.,Fujita H.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

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