MEMS Gyroscope With Concentrated Springs Suspensions Demonstrating Single Digit Frequency Split and Temperature Robustness-Reference-Cited by-同舟云学术

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MEMS Gyroscope With Concentrated Springs Suspensions Demonstrating Single Digit Frequency Split and Temperature Robustness

Published:2019-02 Issue:1 Volume:28 Page:25-35
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Giner Joan^ORCID,Maeda Daisuke^ORCID,Ono Kazuo,Shkel Andrei M.^ORCID,Sekiguchi Tomonori^ORCID

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx7/84/8632823/08550746.pdf?arnumber=8550746

Cited by 35 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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2. A Mode Matched Tuning Fork Gyroscope Using ScAlN-Based Piezoelectric Driving And Sensing;2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS);2024-05-02

3. Two-axis multiple masses resonator with frequency and Q-factor matching;Sensors and Actuators A: Physical;2024-02

4. Virtual Coriolis-Force-Based Mode-Matching Micromachine-Optimized Tuning Fork Gyroscope without a Quadrature-Nulling Loop;Micromachines;2023-08-31

5. Application of MEMS Sensors in IoT-Integrated Frameworks;Advances in MEMS and Microfluidic Systems;2023-06-16

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