A servo-controlled capacitive pressure sensor using a capped-cylinder structure microfabricated by a three-mask process-Reference-Cited by-同舟云学术

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A servo-controlled capacitive pressure sensor using a capped-cylinder structure microfabricated by a three-mask process

Published:2003-04 Issue:2 Volume:12 Page:209-220
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:en
Short-container-title:J. Microelectromech. Syst.

Author:

Jae-Sung Park ,Gianchandani Y.B.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx5/84/26744/01192716.pdf?arnumber=1192716

Cited by 17 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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2. A High-Yield Microfabrication Process for Sapphire Substrate Capacitive Pressure Sensors Providing 70 MPa Range and 0.5 kPa Resolution;IEEE Sensors Journal;2021-12-15

3. A novel capacitive pressure sensor based on non-coplanar comb electrodes;Sensors and Actuators A: Physical;2019-10

4. A 100μm diameter capacitive pressure sensor with 50 MPa dynamic range;Journal of Micromechanics and Microengineering;2016-03-07

5. Pressure Sensors;Reference Module in Materials Science and Materials Engineering;2016

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