Resonant PZT MEMS Scanner for High-Resolution Displays-Reference-Cited by-同舟云学术

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Resonant PZT MEMS Scanner for High-Resolution Displays

Published:2012-12 Issue:6 Volume:21 Page:1303-1310
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Baran Utku,Brown Dean,Holmstrom Sven,Balma Davide,Davis Wyatt O.,Muralt Paul,Urey Hakan

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx5/84/6362208/06265333.pdf?arnumber=6265333

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3. Water-Immersible MEMS Mirror with a Large Optical Aperture;Micromachines;2024-02-02

4. Quasi-statically actuated MEMS scanner with concentric vertical comb electrodes;Micro and Nano Systems Letters;2024-01-31

5. Mirrorless MEMS imaging: a nonlinear vibrational approach utilizing aerosol-jetted PZT-actuated fiber MEMS scanner for microscale illumination;Microsystems & Nanoengineering;2024-01-22

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