Study of Thin Film LiNbO3 Laterally Excited Bulk Acoustic Resonators
Author:
Affiliation:
1. Advanced NEMS Laboratory, École Polytechnique Fédérale de Lausanne (EPFL), Lausanne, Switzerland
2. ANEMS Group, École Polytechnique Fédérale de Lausanne (EPFL), Lausanne, Switzerland
Funder
Innosuisse—Schweizerische Agentur für Innovationsförderung
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Mechanical Engineering
Link
http://xplorestaging.ieee.org/ielx7/84/9745978/09693273.pdf?arnumber=9693273
Reference41 articles.
1. Analysis of methods for determining electromechanical coupling coefficients of piezoelectric elements
2. Piezoelectric and Piezomagnetic Materials and Their Function in Transducers
3. 5 GHz Band n79 wideband microacoustic filter using thin lithium niobate membrane
4. Elimination of Spurious Modes in SH0 Lithium Niobate Laterally Vibrating Resonators
5. Analysis of XBAR resonance and higher order spurious modes
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