Triple Mass Resonator for Electrostatic Quality Factor Tuning
Author:
Affiliation:
1. Department of Robotics, Tohoku University, Sendai, Japan
Funder
Project Commissioned by the New Energy and Industrial Technology Development Organization
Japan Society for the Promotion of Science (JSPS) for Young Scientist
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Mechanical Engineering
Link
http://xplorestaging.ieee.org/ielx7/84/9745978/09676339.pdf?arnumber=9676339
Reference33 articles.
1. Effect of polarization voltage on the measured quality factor of a multiple-beam tuning-fork gyroscope
2. Effect of EAM on Quality Factor and Noise in MEMS Vibratory Gyroscopes
3. Elastic PMLs for resonator anchor loss simulation
4. Electrostatic compensation of structural imperfections in dynamically amplified dual-mass gyroscope
5. Overcoming limitations of Rate Integrating Gyroscopes by virtual rotation
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1. Low-Noise Quality Factor Tuning in Nondegenerate MEMS Gyroscope Without Dedicated Tuning Electrode;IEEE Transactions on Industrial Electronics;2024-04
2. Two-axis multiple masses resonator with frequency and Q-factor matching;Sensors and Actuators A: Physical;2024-02
3. Thermal Stabilization of Quality Factor for Dual-Axis MEMS Gyroscope Based on Joule Effect In Situ Dynamic Tuning;IEEE Transactions on Industrial Electronics;2024-01
4. Virtually Rotated Multiple Mass Resonator Enabled by Electrostatic Frequency and Q-factor Tuning;2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL);2023-03-28
5. Active Quality Factor Stabilization of MEMS Resonator Utilizing Electrical Dissipation Regulation;2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS);2023-01-15
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