Structured design of integrated MEMS-Reference-Cited by-同舟云学术

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Structured design of integrated MEMS

Published:1999 Issue: Volume: Page:
ISSN:
Container-title:Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291)
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Author:

Fedder G.K.

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx4/6037/16111/00746742.pdf?arnumber=746742

Cited by 25 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. What MEMS Research and Development Can Learn from a Production Environment;Sensors;2023-06-13

2. An Efficient Multi-Objective Genetic Algorithm for MEMS Tuning;Advanced Materials Research;2012-12

3. A new optimal design and analysis method based on MADM for MEMS products development;The International Journal of Advanced Manufacturing Technology;2012-02-15

4. Systematic Direct Solid Modeling Approach for Surface Micromachined MEMS;Advanced Materials Research;2012-01

5. Component-Based Modelling and Revising Method for Micro Device;Advanced Materials Research;2011-12

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