Mixed-Type Wafer Defect Recognition With Multi-Scale Information Fusion Transformer
Author:
Affiliation:
1. Glasgow College, University of Electronic Science and Technology of China, Chengdu, China
2. Department of Industrial Engineering, Tsinghua University, Beijing, China
Funder
Innovation Fund of Glasgow College, University of Electronic Science and Technology of China
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://xplorestaging.ieee.org/ielx7/66/9768876/09728745.pdf?arnumber=9728745
Reference30 articles.
1. A Tutorial on Multilabel Learning
2. Classification of Mixed-Type Defect Patterns in Wafer Bin Maps Using Convolutional Neural Networks
3. A model-based clustering approach to the recognition of the spatial defect patterns produced during semiconductor fabrication
4. Spatial defect pattern recognition on semiconductor wafers using model-based clustering and Bayesian inference
5. Detection and classification of defect patterns on semiconductor wafers
Cited by 18 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. DMWMNet: A novel dual-branch multi-level convolutional network for high-performance mixed-type wafer map defect detection in semiconductor manufacturing;Computers in Industry;2024-10
2. Efficient Mixed-Type Wafer Defect Pattern Recognition Based on Light-Weight Neural Network;Micromachines;2024-06-27
3. ADNet: Anti-noise dual-branch network for road defect detection;Engineering Applications of Artificial Intelligence;2024-06
4. Mixed-type wafer defect detection based on multi-branch feature enhanced residual module;Expert Systems with Applications;2024-05
5. An efficient deep learning framework for mixed-type wafer map defect pattern recognition;AIP Advances;2024-04-01
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3