Sound Pressure and Bandwidth Enhanced PMUT with Volume Controllable Helmhotz Resonator for Respiratory Monitoring
Author:
Funder
Ministry of Science and Technology in Taiwan
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9495312/9495375/09495536.pdf?arnumber=9495536
Cited by 3 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Modeling and experimental studies of mutual acoustic radiation effect on PMUT array;Sensors and Actuators A: Physical;2024-10
2. Piezoelectric Micromachined Ultrasonic Transducer-Integrated Helmholtz Resonator with Microliter-Sized Volume-Tunable Cavity;Sensors;2022-10-02
3. Pressure Enhancing and Operating Frequency Tunable Pmut with Compressible Parylene Helmholtz Resonanting Chamber and Active Backing Plate;2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS);2022-01-09
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