Vibration Measurement and Visualization in Semiconductor AMHS on the basis of IoT-Reference-Cited by-同舟云学术

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Vibration Measurement and Visualization in Semiconductor AMHS on the basis of IoT

Published:2021-03-10 Issue: Volume: Page:
ISSN:
Container-title:2021 22nd IEEE International Conference on Industrial Technology (ICIT)
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Author:

Wagner Thomas,Seitz Jonathan,Schneider Germar

Funder

European Commission

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9453462/9453463/09453604.pdf?arnumber=9453604

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. An IoT Solution for Condition Monitoring of a Lithography Coater Tool in a Semiconductor Fab;2022 IEEE 5th International Conference on Industrial Cyber-Physical Systems (ICPS);2022-05-24

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