Micro-mirror arrays for adaptive optics fabricated in polymer technology
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Container-title:The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.
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Author:
Friese C.,Zappe H.
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1 articles.
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1. Adaptive Optics Rotational Design and Electro-Magnetic Actuation;2023 20th Learning and Technology Conference (L&T);2023-01-26