Understanding Electromigration in Cu-CNT Composite Interconnects: A Multiscale Electrothermal Simulation Study

Author:

Lee Jaehyun1,Berrada Salim1,Adamu-Lema Fikru1,Nagy Nicole2,Georgiev Vihar P.1,Sadi Toufik3,Liang Jie4,Ramos Raphael5,Carrillo-Nunez Hamilton1,Kalita Dipankar6,Lilienthal Katharina2,Wislicenus Marcus2,Pandey Reeturaj4,Chen Bingan7,Teo Kenneth B. K.7,Goncalves Goncalo7,Okuno Hanako6,Uhlig Benjamin2,Todri-Sanial Aida4,Dijon Jean5,Asenov Asen1

Affiliation:

1. School of Engineering, University of Glasgow, Glasgow, U.K.

2. Center Nanoelectronic Technologies Department, Fraunhofer Institute for Photonic Microsystems, Dresden, Germany

3. Department of Neuroscience and Biomedical Engineering, Aalto University, Aalto, Finland

4. Microelectronics Department, CNRS-LIRMM, Montpellier, France

5. Nanomaterials Department, CEA-LITEN, University of Grenoble Alpes, Grenoble, France

6. Nanomaterials Department, CEA-INAC, University of Grenoble Alpes, Grenoble, France

7. Nanoinstruments Department, AIXTRON Ltd., Cambridge, U.K.

Funder

European Commission

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials

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