A Mode-localized Resonant Accelerometer Based on A Novel Micro-lever Coupler Resistant to Manufacture Process Defects-Reference-Cited by-同舟云学术

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A Mode-localized Resonant Accelerometer Based on A Novel Micro-lever Coupler Resistant to Manufacture Process Defects

Published:2024-03-25 Issue: Volume: Page:1-4
ISSN:
Container-title:2024 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)
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Author:

Wang Bowen¹,Wang Kunfeng¹,Wang Zheng²,Xiong Xinyin¹,Zhai Zhaoyang¹,Yang Wuhao¹,Zou Xudong¹

Affiliation:

1. Chinese Academy of Sciences,The State Key Laboratory of Transducer Technology, Aerospace Information Research Institute,Beijing,China

2. QiLu Aerospace Information Research Institute,Jinan,China

Funder

National Key Research and Development Program of China

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10502028/10502030/10502031.pdf?arnumber=10502031

Reference12 articles.

1. A Three Degree-of-Freedom Weakly Coupled Resonator Sensor With Enhanced Stiffness Sensitivity

2. Enhancing Parametric Sensitivity in Electrically Coupled MEMS Resonators

3. A review on coupled MEMS resonators for sensing applications utilizing mode localization

4. The temperature drift suppression of mode-localized resonant sensors

5. Ambient pressure drift rejection of mode-localized resonant sensors

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