Author:
Morillo J.D.,Houghton T.,Bauer J.M.,Smith R.,Shay R.
Cited by
2 articles.
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1. The Defect Formation and Reduction of 55NM Ultra-Low Power (55ULP) BEOL Process;2024 Conference of Science and Technology for Integrated Circuits (CSTIC);2024-03-17
2. Edge Zonal Low Yield in FinFET Manufacturing;2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC);2023-05-01