Design and electro-thermal analysis of micro hotplates for chemical sensors using standard multi user MEMS process-Reference-Cited by-同舟云学术

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Design and electro-thermal analysis of micro hotplates for chemical sensors using standard multi user MEMS process

Published:2015-03 Issue: Volume: Page:
ISSN:
Container-title:2015 2nd International Symposium on Physics and Technology of Sensors (ISPTS)
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Author:

Girija K. G.,Kaur Damanjeet,Belwanshi Vinod,Mehta Jyoti,Vatsa R. K.,Topkar Anita

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/7172814/7220063/07220075.pdf?arnumber=7220075

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Optimization of a Meander–Spiral Combination Micro Hotplate for Gas Sensors Based on Numerical Analysis;Transactions on Electrical and Electronic Materials;2018-12-04

2. Low-cost surface micromachined microhotplates for chemiresistive gas sensors;Microsystem Technologies;2018-02-27

3. Design and Simulation of Microelectromechanical Systems (MEMS) for Ozone Gas Sensors;Transactions on Electrical and Electronic Materials;2018-01-29

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