Author:
Liu Jianqiang,Wang Junbao,Bai Zhimin,Li Qiang,Ma Zhenguo,Deng Bin,Qiu Guoqing,Xia Wei,Wang Hougong,Ding Peijun
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1 articles.
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1. Ultra-Deep via Etching of Silicon Oxide for High-Voltage Capacitive Isolators;2024 Conference of Science and Technology for Integrated Circuits (CSTIC);2024-03-17