Suppression of transverse-mode spurious responses for saw resonators on SiO2/Al/LiNbO3 structure by selective removal of SiO2

Author:

Nakamura H.,Nakanishi H.,Goto R.,Hashimoto K.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Acoustics and Ultrasonics,Instrumentation

Cited by 37 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Suppression of Transverse Modes in 50°YX-LiTaO3/SiO2/Si POI SAW Resonator with Groove Configuration;ACS Applied Materials & Interfaces;2024-08-22

2. A Comprehensive Approach for Total Suppression of In-Band Spurious Modes in UHF Al0.72Sc0.28N Lamb Wave Resonators and Filters;Journal of Microelectromechanical Systems;2024-08

3. The Impact of Selectively Filling with SiO2on Transverse Modes in TC-SAW Resonators;2024 IEEE MTT-S International Conference on Microwave Acoustics & Mechanics (IC-MAM);2024-05-13

4. The Suppression of Transverse Modes in POI SAW Resonator with Groove Configuration;2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS);2024-05-02

5. Suppression of spurious responses near anti-resonance of TC-SAW resonators by selective thinning of SiO2;Japanese Journal of Applied Physics;2024-03-01

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