Process and Design Challenge for SMR-type Bulk Acoustic Wave (BAW) Filters at Frequencies Above 5 GHz-Reference-Cited by-同舟云学术

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Process and Design Challenge for SMR-type Bulk Acoustic Wave (BAW) Filters at Frequencies Above 5 GHz

Published:2019-10 Issue: Volume: Page:
ISSN:
Container-title:2019 IEEE International Ultrasonics Symposium (IUS)
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Author:

Schaefer Michael,Rothemund Ralph,Fattinger Gernot

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/8914674/8925542/08925767.pdf?arnumber=8925767

Cited by 16 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A High Quality Factor, 19-GHz Periodically Poled AlScN BAW Resonator Fabricated in a Commercial XBAW Process;IEEE Transactions on Electron Devices;2024-09

2. Automated mode chart generation for finite element analysis of piezoelectric resonators using principal component analysis based on clustering;Japanese Journal of Applied Physics;2024-01-01

3. Influence of Parasitic Couplings on Characteristics of a Filter Based on Solidly Mounted Resonators;2023 Dynamics of Systems, Mechanisms and Machines (Dynamics);2023-11-14

4. Twist Piezoelectric Coupling Properties to Suppress Spurious Modes for Lithium Niobate Thin-film Acoustic Devices;2023 IEEE/MTT-S International Microwave Symposium - IMS 2023;2023-06-11

5. A mm-Wave Trilayer AlN/ScAlN/AlN Higher Order Mode FBAR;IEEE Microwave and Wireless Technology Letters;2023-06

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