A 22-ng/$\surd$ Hz 17-mW Capacitive MEMS Accelerometer With Electrically Separated Mass Structure and Digital Noise- Reduction Techniques-Reference-Cited by-同舟云学术

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A 22-ng/$\surd$ Hz 17-mW Capacitive MEMS Accelerometer With Electrically Separated Mass Structure and Digital Noise- Reduction Techniques

Published:2020-09 Issue:9 Volume:55 Page:2539-2552
ISSN:0018-9200
Container-title:IEEE Journal of Solid-State Circuits
language:
Short-container-title:IEEE J. Solid-State Circuits

Author:

Furubayashi Yuki^ORCID,Oshima Takashi^ORCID,Yamawaki Taizo,Watanabe Keiki,Mori Keijiro,Mori Naoki,Matsumoto Akira,Kamada Yudai^ORCID,Isobe Atsushi^ORCID,Sekiguchi Tomonori^ORCID

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering

Link

http://xplorestaging.ieee.org/ielx7/4/9177374/09093904.pdf?arnumber=9093904

Cited by 27 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. An Ultralow-Power Triaxial MEMS Accelerometer With High-Voltage Biasing and Electrostatic Mismatch Compensation;IEEE Journal of Solid-State Circuits;2024-07

2. Top-Down Design Method of a Time Domain Accelerometer with Adjustable Resolution;Micromachines;2024-05-09

3. A low-noise class AB amplifier fabricated by 180 nm BCD process for servo circuit of quartz flexible accelerometer;Microelectronics Journal;2024-03

4. A 46.6 μg/√Hz Single-Chip Accelerometer Exploiting a DTC-Assisted Chopper Amplifier;IEEE Journal of Solid-State Circuits;2024-02

5. Characterization of Sensitivity of Time Domain MEMS Accelerometer;Micromachines;2024-01-31

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