Fabrication and Characterization of Carbon Cantilevers Derived from Photoresists
Author:
Affiliation:
1. Institute of Microengineering and Nanoelectronics Universiti Kebangsaan Malaysia 43600 UKM Bangi,Selangor,Malaysia
2. University of California,Samueli School of Engineering,Irvine,CA,USA,92697
Funder
Universiti Kebangsaan Malaysia
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10190845/10190847/10190938.pdf?arnumber=10190938
Reference20 articles.
1. Tailoring stress in pyrolytic carbon for fabrication of nanomechanical string resonators
2. Optimizing orientation of piezoelectric cantilever beam for harvesting energy from human walking
3. A survey of MEMS cantilever applications in determining volatile organic compounds
4. Micro-cantilever sensors for monitoring carbon monoxide concentration in fuel cells
5. Design, fabrication and characterization of dielectrophoretic microelectrode array for particle capture
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