A Mach-Zehnder Photonic MEMS Microphone with High Sensitivity, 1/F Noise Suppression, and Broadband Response-Reference-Cited by-同舟云学术

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A Mach-Zehnder Photonic MEMS Microphone with High Sensitivity, 1/F Noise Suppression, and Broadband Response

Published:2024-01-21 Issue: Volume: Page:182-185
ISSN:
Container-title:2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
language:
Short-container-title:

Author:

Wei Xingyu¹,Fang Xiaoyong¹,Shao Lei²,Zhang Wenming¹

Affiliation:

1. Shanghai Jiao Tong University,State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering,Shanghai,China

2. University of Michigan-Shanghai Jiao Tong University Joint Institute, Shanghai Jiao Tong University,Shanghai,China

Funder

National Natural Science Foundation of China

National Science Foundation

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10439241/10439292/10439556.pdf?arnumber=10439556

Reference23 articles.

1. Ultrahigh Sensitivity Fiber-Optic Fabry–Perot Interferometric Acoustic Sensor Based on Silicon Cantilever

2. Fibre Bragg Grating-Based Cascaded Acoustic Sensors for Potential Marine Structural Condition Monitoring

3. Demodulation of EFPI-FBG Hybrid Optical Microphone Based on Spectrum Analysis

4. Fiber Optic Dual-Ring Michelson Interferometer-Based Detection Scheme for the Measurement of Dynamic Signals

5. Underwater low acoustic frequency detection based on in-line Mach–Zehnder interferometer

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