3D Integration technology: Status and application development
Author:
Affiliation:
1. Fraunhofer EMFT (formerly IZM-M), Munich, Germany
2. SINTEF ICT, Oslo, Norway
3. IMEC-SSET, Kapeldreef 75, 3001, Leuven, Belgium
4. Fraunhofer IZM, Gustav-Meyer-Allee 25, 13355 Berlin, Germany
5. 3D-PLUS, 641 rue Hélène Boucher, 78532 Buc, France
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx5/5609034/5619583/05619857.pdf?arnumber=5619857
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