1. Laboratory of Molecular Beam Epitaxy of A3B5 compounds Rzhanov Insitute of semiconductor physics SB RAS,Novosibirsk,Russia
2. Laboratory of Molecular Beam Epitaxy of A3B5 compounds Rzhanov Insitute of semiconductor physics SB RAS, Novosibirsk state technical university,Novosibirsk,Russia
3. Laboratory of Nanodiagnostics and Nanolithograhy Rzhanov Insitute of semiconductor physics SB RAS,Novosibirsk,Russia